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View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  SC 13G/A   WAX ASSET MANAGEMENT, LLC  09/06/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   DAIGLE ROBERT C  08/16/24 08/14/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   AVERICK ROBERT M  08/13/24 08/09/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   JENKE WADE MICHAEL  08/09/24 08/08/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  3   JENKE WADE MICHAEL  08/09/24 08/08/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRL  8-K   AMTECH SYSTEMS INC  08/07/24 08/06/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRLView Filing in Redline  10-Q   AMTECH SYSTEMS INC  08/07/24 06/30/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  SD   AMTECH SYSTEMS INC  05/29/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   AVERICK ROBERT M  05/14/24 05/10/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  SC 13D/A   PITON CAPITAL PARTNERS LLC  05/14/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRLView Filing in Redline  10-Q   AMTECH SYSTEMS INC  05/08/24 03/31/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRL  8-K   AMTECH SYSTEMS INC  05/08/24 05/08/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   GIBBS LISA  03/18/24 03/15/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   LUDWIG MICHAEL M  03/13/24 03/11/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   GARNREITER MICHAEL  03/08/24 03/06/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   LUDWIG MICHAEL M  03/08/24 03/06/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRL  8-K   AMTECH SYSTEMS INC  03/08/24 03/06/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   AVERICK ROBERT M  03/08/24 03/06/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRL  8-K   AMTECH SYSTEMS INC  03/05/24 03/01/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   DAIGLE ROBERT C  03/04/24 02/29/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   LUDWIG MICHAEL M  03/04/24 03/01/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   GARNREITER MICHAEL  03/04/24 03/01/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   AVERICK ROBERT M  03/04/24 03/01/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original FormatView Filing in XBRL  8-K   AMTECH SYSTEMS INC  02/29/24 02/29/24   File this document to a folder.
View Filing in HTMLView Filing in RTFView Filing in PDFView Filing in ExcelView Filing in Original Format  4   DAIGLE ROBERT C  02/15/24 02/13/24   File this document to a folder.
 
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